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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
2002
2003
2004
2005
2006
2007
2008
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2012
2013
2004, vol.22, no.1
2004, vol.22, no.2
2004, vol.22, no.3
2004, vol.22, no.4
2004, vol.22, no.5
2004, vol.22, no.6
题名
作者
出版年
年卷期
High resolution, high speed ultrahigh vacuum microscopy
Helmut Poppa
2004
2004, vol.22, no.5
Generation of low-energy neutral beam for Si etching
S. J. Kim; S. J. Wang; J. K. Lee; D. H. Lee; G. Y. Yeom
2004
2004, vol.22, no.5
Infrared reflectance of GaN{sub}(1-x)P{sub}x ternary alloys grown by metalorganic chemical vapor deposition
J. B. Wang; Z. F. Li; W. Lu; D. J. Chen; B. Shen; Y. D. Zheng
2004
2004, vol.22, no.5
Interpretation of stress variation in silicon nitride films deposited by electron cyclotron resonance plasma
M. P. Besland; M. Lapeyrade; F. Delmotte; G. Hollinger
2004
2004, vol.22, no.5
Microstructure and Mg concentration of Mg-Si thin film deposited by ion beam sputtering on glass substrate
T. Serikawa; M. Henmi; K. Kondoh
2004
2004, vol.22, no.5
Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering
S. M. Aouadi; M. Debessai
2004
2004, vol.22, no.5
Evaluation of Schottky barrier height of TiN/p-type Si(100)
Joshua Pelleg; A. Douhin
2004
2004, vol.22, no.5
Real-time acoustic sensing and control of metalorganic chemical vapor deposition precursor concentrations delivered from solid phase sources
L. Henn-Lecordier; J. N. Kidder, Jr.; G. W. Rubloff
2004
2004, vol.22, no.5
Wide range flow sensor-Vacuum through viscous flow conditions
Hemi Sagi; Yabin Zhao; S. T. Wereley
2004
2004, vol.22, no.5
Effect of nano-crystallization of high velocity oxy-fuel-sprayed amorphous NiCrBSi alloy on properties of the coatings
Chang-Jiu Li; Yu-Yue Wang; Hua Li
2004
2004, vol.22, no.5
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