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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
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2003
2004
2005
2006
2007
2008
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2012
2013
2005, vol.23, no.1
2005, vol.23, no.2
2005, vol.23, no.3
2005, vol.23, no.4
2005, vol.23, no.5
2005, vol.23, no.6
题名
作者
出版年
年卷期
Growth of heteroepitaxial ZnO thin film and ZnO/(Mg,Zn)O nanomultilayer by off-axis rf magnetron sputtering
Jae-Wan Park; Yumi Park; Jong-Wan Park; Minhyon Jeon; Jeon-Kook Lee
2005
2005, vol.23, no.1
Design of functional coatings
D. Hegemann; C. Oehr; A. Fischer
2005
2005, vol.23, no.1
Characteristics of Ti-Si-N coatings on geometrically complex-shaped surface
Qingsong Ma; Shengli Ma; Kewei Xu
2005
2005, vol.23, no.1
Ionization of sputtered metals in high power pulsed magnetron sputtering
Johan Bohlmark; Jones Alami; Chris Christou; Arutiun P. Ehiasarian; Ulf Helmersson
2005
2005, vol.23, no.1
Collisional ion dynamics in capacitively coupled rf discharges
N. Xiang; F. L. Waelbroeck
2005
2005, vol.23, no.1
Atomistic simulations of Ar{sup}+-ion-assisted etching of silicon by fluorine and chlorine
David Humbird; David B. Graves
2005
2005, vol.23, no.1
Dynamic control of substrate bias for highly c-axis textured thin ferromagnetic CoCrTa film in inductively coupled plasma-assisted sputtering
Kunio Okimura; Junya Oyanagi
2005
2005, vol.23, no.1
Influence of processing variables on the properties of dc magnetron sputtered NiAl coatings containing Hf additions
B. Ning; M. Shamsuzzoha; M. L. Weaver
2005
2005, vol.23, no.1
Outgassing of lower hybrid antenna modules during high-power long-pulse transmission
M. Goniche; F. Kazarian; P. Bibet; S. Maebara; M. Seki; Y. Ikeda; T. Imai
2005
2005, vol.23, no.1
Pulsed dc operation of a Penning-type opposed target magnetron
T. Moiseev; D. C. Cameron
2005
2005, vol.23, no.1
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