期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2005, vol.23, no.1 2005, vol.23, no.2 2005, vol.23, no.3 2005, vol.23, no.4 2005, vol.23, no.5 2005, vol.23, no.6

题名作者出版年年卷期
Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometryS. B. S. Heil; E. Langereis; A. Kemmeren; F. Roozeboom; M. C. M. van de Sanden; W. M. M. Kessels20052005, vol.23, no.4
In situ examination of tin oxide atomic layer deposition using quartz crystal microbalance and Fourier transform infrared techniquesX. Du; Y. Du; S. M. George20052005, vol.23, no.4
Characterization of nitrogen distribution in HfO{sub}2 with low energy secondary ion mass spectrorrsetryZ. X. Jiang; K. Kim; J. Lerma; D. Sieloff; T. Y. Luo; J. Y. Yang; D. Triyoso; H. Tseng; P. Tobin; N. Ramani20052005, vol.23, no.4
Microstructure and nanohardness properties of Zr-Al-N and Zr-Cr-N thin filmsR. Lamni; R. Sanjines; M. Parlinska-Wojtan; A. Karimi; F. Levy20052005, vol.23, no.4
Inhibition of excess interface Si atom generation in 700℃-grown pyrolytic-gas passiveted ultrathin silicon oxide filmsHiroshi Yamada20052005, vol.23, no.4
Enlargement of grain in poly-Si by adding Au in Ni-mediated crystallization of amorphous Si using a SiN{sub}x cap layerKyung Ho Kim; Jae Hwan Oh; Eun Hyun Kim; Jin Jang; Jeon Yeon Kang; Kyu Hwan Oh20052005, vol.23, no.4
Sb-induced reconstruction of the Si(112) surfaceE. S. Cho; M. K. Kim; H. Hur; J. W. Park; J. Y. Baik; N. H. Kim; C. Y. Park; K. S. An20052005, vol.23, no.4
Adsorption and reactions of tetrabutoxysilane (TBOS) on Si(100)Nakyung Lee; Kijung Yong; Hyun Suk Jeong; Chang Min Kim20052005, vol.23, no.4
Clean wurtzste InN surfaces prepared with atomic hydrogenL. F. J. Piper; T. D. Veal; M. Walker; I. Mahboob; C. F. McConville; Hai Lu; W. J. Schaff20052005, vol.23, no.4
Microstructural evolution of AIN coatings synthesized by unbalanced magnetron sputteringC. C. Wang; C. J. Lu; M. H. Shiao; F. S. Shieu20052005, vol.23, no.4
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