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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2002
2003
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2013
2002, vol.11, no.1
2002, vol.11, no.2
2002, vol.11, no.3
2002, vol.11, no.4
2002, vol.11, no.5
2002, vol.11, no.6
题名
作者
出版年
年卷期
Post-CMOS processing for high-aspect-ratio integrated silicon microstructures
Huikai Xie; Lars Erdmann; Xu Zhu; Kaigham J. Gabriel; Gary K. Fedder
2002
2002, vol.11, no.2
Batch mode micro-electro-discharge machining
Ken'ichi Takahata; Yogesh B. Gianchandani
2002
2002, vol.11, no.2
Real-time etch-depth measurements of MEMS devices
Sylvie Bosch-Charpenay; Jiazhan Xu; John Haigis; Peter A. Rosenthal; Peter R. Solomon; James M. Bustillo
2002
2002, vol.11, no.2
Convective-diffusive mass transfer inside complex micro-molds during electrodeposition
Weihua Wang; Steven D. Leith; Daniel T. Schwartz
2002
2002, vol.11, no.2
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures
Takahiro Namazu; Yoshitada Isono; Takeshi Tanaka
2002
2002, vol.11, no.2
Optomechanical uncooled infrared imaging system: design, microfabrication, and performance
Yang Zhao; Minyao Mao; Roberto Horowitz; Arunava Majumdar; John Varesi; Paul Norton; John Kitching
2002
2002, vol.11, no.2
Integrated microrelays: concept and initial results
Han-Sheng Lee; Chi H. Leung; Jenny Shi; Shih-Chia Chang; Samuel Lorincz; Iulian Nedelescu
2002
2002, vol.11, no.2
Silicon fabricated submicrometer stepper motor for microsurgical procedures
David Peichel; David Marcus; Raed N. Rizq; Aurthur G. Erdman; William P. Robbins; Dennis L. Polla
2002
2002, vol.11, no.2
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