知识中心主页
文献服务
文献资源
外文期刊
外文会议
专业机构
智能制造
高级检索
版权声明
使用帮助
期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2002, vol.11, no.1
2002, vol.11, no.2
2002, vol.11, no.3
2002, vol.11, no.4
2002, vol.11, no.5
2002, vol.11, no.6
题名
作者
出版年
年卷期
Electrothermally activated paraffin microactuators
Edwin T. Carlen; Carlos H. Mastrangelo
2002
2002, vol.11, no.3
Surface modification with self-assembled monolayers of nanoscale replication of photoplastic MEMS
Gyu Man Kim; Beomjoon Kim; Maik Liebau; Jurriaan Huskens; David N. Reinhoudt; Jurgen Brugger
2002
2002, vol.11, no.3
Sub-10 cm{sup}3 interferometric accelerometer with nano-g resolution
Nin C. Loh; Martin A. Schmidt; Scott R. Manalis
2002
2002, vol.11, no.3
A post-CMOS micromachined lateral accelerometer
Hao Luo; Gang Zhang; L. Richard Carley; Gary K. Fedder
2002
2002, vol.11, no.3
Voltage and pull-in time in current drive of electrostatic actuators
Joan Pons-Nin; Angel Rodriguez; Luis M. Castaner
2002
2002, vol.11, no.3
The reliability of microelectromechanical systems (MEMS) in shock environments
V. T. Srikar; Stephen D. Senturia
2002
2002, vol.11, no.3
Microprobe array with electrical interconnection for thermal imaging and data storage
Dong-Weon Lee; Takahito Ono; Takashi Abe; Masayoshi Esashi
2002
2002, vol.11, no.3
An electrostatic microactuator system for application in high-speed jets
Chunchieh Huang; Christophoros Christophorou; Khalil Najafi; Ahmed Naguib; Hassan M. Ngib
2002
2002, vol.11, no.3
Pressure loss in constriction microchannels
Wing Yin Lee; Man Wong; Yitshak Zohar
2002
2002, vol.11, no.3
A Lagrangian approach for electrostatic analysis of deformable conductors
Gang Li; N. R. Aluru
2002
2002, vol.11, no.3
1
2
制造业外文文献服务平台