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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
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2002
2003
2004
2005
2006
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2008
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2013
2004, vol.13, no.1
2004, vol.13, no.2
2004, vol.13, no.3
2004, vol.13, no.4
2004, vol.13, no.5
2004, vol.13, no.6
题名
作者
出版年
年卷期
A Sweeping Mode Integrated Fingerprint Sensor With 256 Tactile Microbeams
Benoit Chariot; Fabien Parrain; Nicolas Galy; Skandar Basrour; Bernard Courtois
2004
2004, vol.13, no.4
Nonlinear Dynamic Characteristics of Piezoelectric Bending Actuators Under Strong Applied Electric Field
L. Q. Yao; J. G. Zhang; L. Lu; M. O. Lai
2004
2004, vol.13, no.4
Zirconium Tungstate (ZrW{sub}2O{sub}8)-Based Micromachined Negative Thermal-Expansion Thin Films
Michael S. Sutton; Joseph Talghader
2004
2004, vol.13, no.4
Pulsed-Laser Annealing, a Low-Thermal-Budget Technique for Eliminating Stress Gradient in Poly-SiGe MEMS Structures
Sherif Sedky; Roger T. Howe; Tsu-Jae King
2004
2004, vol.13, no.4
Recovery of Stiction-Failed MEMS Structures Using Laser-Induced Stress Waves
Vijay Gupta; Richard Snow; Ming C. Wu; Amit Jain; Jui-che Tsai
2004
2004, vol.13, no.4
Development of Si-SiC Hybrid Structures for Elevated Temperature Micro-Turbomachinery
Hyung-Soo Moon; Dongwon Choi; S. Mark Spearing
2004
2004, vol.13, no.4
An Improved Reynolds-Equation Model for Gas Damping of Microbeam Motion
Michael A. Gallis; John R. Torczynski
2004
2004, vol.13, no.4
Hybrid Nanotransport System by Biomolecular Linear Motors
Ryuji Yokokawa; Shoji Takeuchi; Takahide Kon; Masaya Nishiura; Reiko Ohkura; Masaki Edamatsu; Kazuo Sutoh; Hiroyuki Fujita
2004
2004, vol.13, no.4
An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer With CMOS Readout Circuitry
Junseok Chae; Haluk Kulah; Khalil Najafi
2004
2004, vol.13, no.4
A Method for Precision Patterning of Silicone Elastomer and Its Applications
Kee Suk Ryu; Xuefeng Wang; Kashan Shaikh; Chang Liu
2004
2004, vol.13, no.4
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