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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
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2003
2004
2005
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2013
2004, vol.13, no.1
2004, vol.13, no.2
2004, vol.13, no.3
2004, vol.13, no.4
2004, vol.13, no.5
2004, vol.13, no.6
题名
作者
出版年
年卷期
Photoresist Coating Methods for the Integration of Novel 3-D RF Microstructures
Nga Phuong Pham; E. Boellaard; Joachim N. Burghartz; Pasqualina M. Sarro
2004
2004, vol.13, no.3
Shape-Memory Polymers for Microelectromechanical Systems
Ken Gall; Paul Kreiner; David Turner; Michael Hulse
2004
2004, vol.13, no.3
A Novel Method of Fabricating Integrated FETs for MEMS Applications
Bruce L. Draper; Murat Okandan; Seethambal S. Mani; R. S. Bennett
2004
2004, vol.13, no.3
An Optically Powered Wireless Telemetry Module for High-Temperature MEMS Sensing and Communication
Michael Suster; Wen H. Ko; Damn J. Young
2004
2004, vol.13, no.3
Fabrication and Characterization of a Nanowire/Polymer-Based Nanocomposite for a Prototype Thermoelectric Device
Alexis R. Abramson; Woo Chul Kim; Scott T. Huxtable; Haoquan Yan; Yiying Wu; Arun Majumdar; Chang-Lin Tien; Peidong Yan
2004
2004, vol.13, no.3
Ka-Band Distributed MEMS Phase Shifters on Silicon Using AISi Suspended Membrane
Jian Qing; Yanling Shi; Wei Li; Zongsheng Lai; Ziqiang Zhu; Peisheng Xin
2004
2004, vol.13, no.3
Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications
Jonathan J. Bernstein; William P. Taylor; John D. Brazzle; Christopher J. Corcoran; Gregory Kirkos; Jefferson E. Odhner; Ajay Pareek; Marc Waelti; Marvin Zai
2004
2004, vol.13, no.3
An Additive Micromolding Approach for the Development of Micromachined Ceramic Substrates for RF Applications
Kunal Vaed; John Florkey; Sheikh A. Akbar; Marc J. Madou; John J. Lannutti; Sean S. Cahill
2004
2004, vol.13, no.3
Parylene Surface-Micromachined Membranes for Sensor Applications
Zhifang Fan; Jonathan M. Engel; Jack Chen; Chang Liu
2004
2004, vol.13, no.3
Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning Capabilities
Hung D. Nguyen; Dooyoung Hah; Pamela R. Patterson; Rumin Chao; Wibool Piyawattanametha; Erwin K. Lau; Ming C. Wu
2004
2004, vol.13, no.3
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