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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2010
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2013
2010, vol.19, no.1
2010, vol.19, no.2
2010, vol.19, no.3
2010, vol.19, no.4
2010, vol.19, no.5
2010, vol.19, no.6
题名
作者
出版年
年卷期
Modeling and Measurement of a Bistable Beam in a Microelectromechanical System
Matthew R. Brake; Michael S. Baker; Nathan W. Moore; Douglas A. Crowson; John A. Mitchell; Jack E. Houston
2010
2010, vol.19, no.6
Strain Effect of the Dielectric Constant in Silicon Dioxide
Jian-Qiu Huang; Qing-An Huang; Ming Qin; Weijie Dong; Xiaowei Chen
2010
2010, vol.19, no.6
Low-Power High-Speed Electromagnetic Flapping Shutters Using Trapezoidal Shutter Blades Suspended by H-Type Torsional Springs
Hyun-Young Choi; Won Han; Young-Ho Cho
2010
2010, vol.19, no.6
Vibration-Based Monitoring and Diagnosis of Dielectric Charging in RF-MEMS Switches
Jin Woo Lee; Ajit K. Mahapatro; Dimitrios Peroulis; Arvind Raman
2010
2010, vol.19, no.6
High-Pressure Peristaltic Membrane Micropump With Temperature Control
Stefan Svensson; Gunjana Sharma; Sam Ogden; Klas Hjort; Lena Klintberg
2010
2010, vol.19, no.6
Vortex Anemometer Using MEMS Cantilever Sensor
Pawel Zylka; Pawel Modrzynski; Pawel Janus
2010
2010, vol.19, no.6
A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers
Jiachou Wang; Xinxin Li
2010
2010, vol.19, no.6
An Optofluidic Concept for a Tunable Micro-iris
Philipp Muller; Nils Spengler; Hans Zappe; Wolfgang Monch
2010
2010, vol.19, no.6
Design and Fabrication of a High-Power Eyeball-Like Microactuator Using a Symmetric Piezoelectric Pusher Element
Sheng-Chih Shen; Juin-Cherng Huang
2010
2010, vol.19, no.6
A Tip-Tilt-Piston Micromirror Array for Optical Phased Array Applications
Lei Wu; Sarah Dooley; Edward A. Watson; Paul F. McManamon; Huikai Xie
2010
2010, vol.19, no.6
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