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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2005
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2010
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2013
2010, vol.19, no.1
2010, vol.19, no.2
2010, vol.19, no.3
2010, vol.19, no.4
2010, vol.19, no.5
2010, vol.19, no.6
题名
作者
出版年
年卷期
Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification
Aslihan Arslan; Dean Brown; Wyatt O. Davis; Sven Holmstrom; Sertan Kutal Gokce; Hakan Urey
2010
2010, vol.19, no.4
Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can
Hoang Manh Chu; Takayuki Tokuda; Masafumi Kimata; Kazuhiro Hane
2010
2010, vol.19, no.4
Accurate Temperature Monitoring in Laser-Assisted Polymer Bonding for MEMS Packaging Using an Embedded Microsensor Array
Yufei Liu; Jun Zeng; Changhai Wang
2010
2010, vol.19, no.4
A Versatile Integration Technology of SOI-MEMS/CMOS Devices Using Microbridge Interconnection Structures
Hidekuni Takao; Takehiko Ichikawa; Tooru Nakata; Kazuaki Sawada; Makoto Ishida
2010
2010, vol.19, no.4
Device-Level Vacuum Packaging for RF MEMS
M. Shahriar Rahman; Murali M. Chitteboyina; Donald P. Butler; Zeynep Celik-Butler; Sergio P. Pacheco; Ronald V. McBean
2010
2010, vol.19, no.4
A Polymer-Based Microfluidic Platform Featuring On-Chip Actuated Hydrogel Valves for Disposable Applications
Emil J. Geiger; Albert P. Pisano; Frantisek Svec
2010
2010, vol.19, no.4
Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications
Luke Armitage Beardslee; Assim M. Addous; Stephen Heinrich; Fabien Josse; Isabelle Dufour; Oliver Brand
2010
2010, vol.19, no.4
Miniature Monolithic Rectilinear Ion Trap Arrays by Stereolithography on Printed Circuit Board
Jeffrey Daniel Maas; Paul Isaac Hendricks; Zheng Ouyang; R. Graham Cooks; William Johnson Chappell
2010
2010, vol.19, no.4
Seesaw Relay Logic and Memory Circuits
Jaeseok Jeon; Vincent Pott; Hei Kam; Rhesa Nathanael; Elad Alon; Tsu-Jae King Liu
2010
2010, vol.19, no.4
The Nanoaquarium: A Platform for In Situ Transmission Electron Microscopy in Liquid Media
Joseph M. Grogan; Haim H. Bau
2010
2010, vol.19, no.4
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