期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2011, vol.20, no.1 2011, vol.20, no.2 2011, vol.20, no.3 2011, vol.20, no.4 2011, vol.20, no.5 2011, vol.20, no.6

题名作者出版年年卷期
Realization of Three-Dimensional Si and SiO_2 Nanowall Structures Using Reactive Ion EtchingS. Azimi; A. Sandoughsaz; S. Mohajerzadeh20112011, vol.20, no.2
AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and OscillatorsGaurav Bahl; James C. Salvia; Renata Melamud; Bongsang Kim; Roger T. Howe; Thomas W. Kenny20112011, vol.20, no.2
Capacitive RF MEMS Switches With Tantalum-Based MaterialsAnna Persano; Adriano Cola; Giorgio De Angelis; Antonietta Taurino; Pietro Siciliano; Fabio Quaranta20112011, vol.20, no.2
Electrothermomechanical Finite-Element Modeling of Metal Microcontacts in MEMSPratheek Shanthraj; Omid Rezvanian; Mohammed A. Zikry20112011, vol.20, no.2
Omnidirectional Actuation of Magnetically Driven Microtool for Cutting of Oocyte in a ChipNaoki Inomata; Takehito Mizunuma; Yoko Yamanishi; Fumihito Arai20112011, vol.20, no.2
Focus-Tunable Microlens Arrays Fabricated on Spherical SurfacesDifeng Zhu; Xuefeng Zeng; Chenhui Li; Hongrui Jiang20112011, vol.20, no.2
Metal-Transfer-Micromolded Three-Dimensional Microelectrode Arrays for in-vitro Brain-Slice RecordingsSwaminathan Rajaraman; Seong O. Choi; Maxine A. McClain; James D. Ross; Michelle C. LaPlaca; Mark G. Allen20112011, vol.20, no.2
The Development of Polymer-Based Flat Heat PipesChristopher Oshman; Bo Shi; Chen Li; Ronggui Yang; Y. C. Lee; G. P. Peterson; Victor M. Bright20112011, vol.20, no.2
Development of an Alkaline-Compatible Porous-Silicon Photolithographic ProcessMeifang Lai; Giacinta Parish; Yinong Liu; John M. Dell; Adrian J. Keating20112011, vol.20, no.2
Self-Assembled Monolayer-Immobilized Gold Nanoparticles as Durable, Anti-Stiction Coatings for MEMSKendall M. Hurst; Naveed Ansari; Christopher B. Roberts; W. Robert Ashurst20112011, vol.20, no.2
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