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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2011
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2013
2011, vol.20, no.1
2011, vol.20, no.2
2011, vol.20, no.3
2011, vol.20, no.4
2011, vol.20, no.5
2011, vol.20, no.6
题名
作者
出版年
年卷期
Strengthening for sc-Si Solar Cells by Surface Modification With Nanowires
Chi-Nan Chen; Chuan-Torng Huang; Chen-Liang Chao; Max Ti-Kuang Hou; Wen-Ching Hsu; J. Andrew Yeh
2011
2011, vol.20, no.3
Acceleration of Microwelding on Ohmic RF-MEMS Switches
Augusto Tazzoli; Gaudenzio Meneghesso
2011
2011, vol.20, no.3
A Single-Polarity Piezoresistive Three-Dimensional Stress-Sensing Rosette
H. H. Gharib; W. A. Moussa
2011
2011, vol.20, no.3
Frequency Tuning of VO_2-Coated Buckled Microbridges
Emmanuelle Merced; Rafmag Cabrera; Horacio Coy; Felix E. Fernandez; Nelson Sepulveda
2011
2011, vol.20, no.3
Solder Pump Technology for Through-Silicon via Fabrication
Jiebin Gu; W. T. Pike; W. J. Karl
2011
2011, vol.20, no.3
One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration
Fabian Zimmer; Martin Lapisa; Thor Bakke; Martin Bring; Goran Stemme; Frank Niklaus
2011
2011, vol.20, no.3
High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip-Tilt-Piston Capability
Kemiao Jia; Sean R. Samuelson; Huikai Xie
2011
2011, vol.20, no.3
Fiber Endoscopes Utilizing Liquid Tunable-Focus Microlenses Actuated Through Infrared Light
Xuefeng Zeng; Carter T. Smith; Jon C. Gould; Charles P. Heise; Hongrui Jiang
2011
2011, vol.20, no.3
A Three-Dimensional 64-Site Folded Electrode Array Using Planar Fabrication
Sister Mary Elizabeth Merriam; Onnop Srivannavit; Mayurachat Ning Gulari; Kensall D. Wise
2011
2011, vol.20, no.3
A Thermally Actuated Microelectromechanical (MEMS) Device for Measuring Viscosity
Ivan Puchades; Lynn F. Fuller
2011
2011, vol.20, no.3
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