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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2002
2003
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2013
2002, vol.20, no.1
2002, vol.20, no.2
2002, vol.20, no.3
2002, vol.20, no.4
2002, vol.20, no.5
2002, vol.20, no.6
题名
作者
出版年
年卷期
Titanium atom densities in reactive rf magnetron sputtering for TiO{sub}2
Tadashi Nakamura; Kunio Okimura
2002
2002, vol.20, no.1
Theoretical study of Cr diffusion in Co-Cr alloy thin film recording media
Ding Jin; Jian Ping Wang; Hao Gong
2002
2002, vol.20, no.1
Model for an inductively coupled Ar/c-C{sub}4F{sub}8 plasma discharge
Shahid Rauf; Peter L. G. Ventzek
2002
2002, vol.20, no.1
Generation of a capacitively coupled microplasma and its application to the inner-wall modification of a poly(ethylene terephthalate) capillary
Hiroyuki Yoshiki; Akio Oki; Hiroki Ogawa; Yasuhiro Horiike
2002
2002, vol.20, no.1
Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas
Ikurou Umezu; Kiminori Kohno; Tomohiro Yamaguchi; Akira Sugimura
2002
2002, vol.20, no.1
Reduction of residual gas in a sputtering system by auxiliary sputter of rare-earth metal
Dejie Li
2002
2002, vol.20, no.1
Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: substrate interfacial reactivity
M. Losurdo; M. Giangregorio; P. Capezzuto; G. Bruno; R. De Rosa; F. Roca; C. Summonte; J. Pla; R. Rizzoli
2002
2002, vol.20, no.1
Effect of chamber wall conditions on Cl and Cl{sub}2 concentrations in an inductively coupled plasma reactor
Saurabh J. Ullal; Anna R. Godfrey; Erik Edelberg; Linda Braly; Vahid Vahedi; Eray S. Aydil
2002
2002, vol.20, no.1
Morphological transitions of Si{sub}(1-x)Ge{sub}x films growing on Si(100). I. Gal-source molecular-beam epitaxy: from two-dimensional growth to growth in the Stranski-Krastanov mode
Housei Akazawa
2002
2002, vol.20, no.1
Morphological transition of Si{sub}(1-x)Ge{sub}x films growing on Si(100). II. Synchrotron-radiation-excited chemical-vapor deposition: from two-dimensional growth to growth in the Volmer-Weber mode
Housei Akazawa
2002
2002, vol.20, no.1
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