期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2002, vol.20, no.1 2002, vol.20, no.2 2002, vol.20, no.3 2002, vol.20, no.4 2002, vol.20, no.5 2002, vol.20, no.6

题名作者出版年年卷期
Mass spectrometric studies of low pressure CH{sub}4, CH{sub}4/H{sub}2, and H{sub}2 plasma beams generated by an inductively coupled radio frequency dischargeKatsuyuki Okada; Shojiro Komatsu20022002, vol.20, no.6
Investigation of the hydrogenation properties of Zr films under unclean plasma conditionsL. Q. Shi; G. Q. Yan; J. Y. Zhou; S. Z. Luo; S. M. Peng; W. Ding; X. G. Long20022002, vol.20, no.6
Electron emission suppression characteristics of molybdenum grids coated with carbon film by ion beam assisted depositionXianghuai Liu; Congxin Ren; Bingyao Jiang; Hong Zhu Yanyuan Liu; Jingxian Wu20022002, vol.20, no.6
Investigation and simulation of XeF{sub}2 isotropic etching of siliconBeharaad Bahreyni; C. Shafai20022002, vol.20, no.6
Quantitative analysis of annealing-induced structure disordering in ion-implanted amorphous siliconYu-Yin Cheng; J. M. Gibson; P. M. Baldo; B. J. Kestel20022002, vol.20, no.6
Thermal stability of Pr{sub}2O{sub}3 films grown on Si(100) substrateA. Goryachko; J. P. Liu; D. Kruger; H. J. Osten; E. Bugiel; R. Kurps; V. Melnik20022002, vol.20, no.6
Angle-resolved X-ray photoelectron spectroscopy ultrathin Al{sub}2O{sub}3 films grown by atomic layer depositionO. Renault; L. G. Gosset; D. Rouchon; A. Ermolieff20022002, vol.20, no.6
Investigation of thermal flux to the substrate during sputter deposition of aluminumSamuel D. Ekpe; Steven K. Dew20022002, vol.20, no.6
Structural and luminescent properties of ZnTe film grown on silicon by metalorganic chemical vapor depositionC. X. Shan; X. W. Fan; J. Y. Zhang; Z. Z. Zhang; X. H. Wang; J. G. Ma; Y. M. Lu; Y. C. Liu; D. Z. Shen; X. G. Kong; G. Z. Zhong20022002, vol.20, no.6
Wet chemical etching studies of Zr and Hf-silicate gate dielectricsM. A. Quevedo-Lopez; M. El-Bouanani; R. M. Wallace; B. E. Gnade20022002, vol.20, no.6
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