知识中心主页
文献服务
文献资源
外文期刊
外文会议
专业机构
智能制造
高级检索
版权声明
使用帮助
期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2002, vol.20, no.1
2002, vol.20, no.2
2002, vol.20, no.3
2002, vol.20, no.4
2002, vol.20, no.5
2002, vol.20, no.6
题名
作者
出版年
年卷期
Growth behaviors of low-pressure metalorganic chemical vapor deposition aluminum silicate films deposited with two kinds of silicon sources: hexamethyldisilazane and tetraethyl orthosilicate
Dong-Hau Kuo; Po-Yo Chuang
2002
2002, vol.20, no.5
Growth-controlled cubic zirconia microstructure in zirconia-titania nanolaminates
J. D. DeLoach; C. R. Aita; C. -K. Loong
2002
2002, vol.20, no.5
Ion-enhanced chemical etching of ZrO{sub}2 in a chlorine discharge
Lin Sha; Byeong-Ok Cho; Jane P. Chang
2002
2002, vol.20, no.5
Annealing behavior of a Cs{sub}2O/Cs{sub}2O{sub}2/GaAs(110) surface studied by electron spectroscopy
J. X. Wu; F. Q. Li; J. S. Zhu; M. R. Ji; M. S. Ma
2002
2002, vol.20, no.5
Semiempirical profile simulation of aluminum etching in a Cl{sub}2/BCl{sub}3 plasma
D. J. Cooperberg; V. Vahedi; R. A. Gottscho
2002
2002, vol.20, no.5
Transition layers in metal bilayers produced by pulsed laser deposition in vacuum
A. Tselev; A. Gorbunov; W. Pompe
2002
2002, vol.20, no.5
Generating high-efficiency neutral beams by using negative ions in an inductively coupled plasma source
Seiji Samukawa; Keisuke Sakamoto; Katsunori Ichiki
2002
2002, vol.20, no.5
Redeposition of etch products on sidewalls during SiO{sub}2 etching in a fluorocarbon plasma - I: effect of particle emission from the bottom surface in a CF{sub}4 plasma
Jae-Ho Min; Sung-Wook Hwang; Gyeo-Re Lee; Sang Heup Moon
2002
2002, vol.20, no.5
Thermal decomposition pathway and desorption study of isopropanol and tert-butanol on Si(100)
Jaehyun Kim; Kwansoo Kim; Kijung Yong
2002
2002, vol.20, no.5
Optimized oxygen plasma etching of polyimide films for low loss optical waveguides
Navnit Agarwal; Shom Ponoth; Joel Plawsky; P. D. Persans
2002
2002, vol.20, no.5
1
2
3
4
5
制造业外文文献服务平台