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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2004
2005
2006
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2013
2005, vol.14, no.1
2005, vol.14, no.2
2005, vol.14, no.3
2005, vol.14, no.4
2005, vol.14, no.5
2005, vol.14, no.6
题名
作者
出版年
年卷期
Design and Optimization of a MEMS Electret-Based Capacitive Energy Scavenger
Fabio Peano; Tiziana Tambosso
2005
2005, vol.14, no.3
Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity Measurements
Joost W. van Honschoten; Vitaly B. Svetovoy; Gijs J. M. Krijnen; Miko C. Elwenspoek
2005
2005, vol.14, no.3
An X-Axis Single-Crystalline Silicon Microgyroscopej Fabricated by the Extended SBM Process
Jongpal Kim; Sangjun Park; Donghun Kwak; Hyoungho Ko; Dong-il Dan Cho
2005
2005, vol.14, no.3
Reconfigurable Millimeter-Wave Filters Using CPW-Based Periodic Structures With Novel Multiple-Contact MEMS Switches
Jae-Hyoung Park; Sanghyo Lee; Jung-Mu Kim; Hong-Teuk Kim; Youngwoo Kwon; Yong-Kweon Kim
2005
2005, vol.14, no.3
RF MEMS Membrane Switches on GaAs Substrates for X-Band Applications
Wei-Bin Zheng; Qing-An Huang; Xiao-Ping Liao; Fu-Xiao Li
2005
2005, vol.14, no.3
Arrays of Hollow Out-of-Plane Microneedles for Drug Delivery
Boris Stoeber; Dorian Liepmann
2005
2005, vol.14, no.3
A Three-Dimensional Dielectrophoretic Particle Focusing Channel for Microcytometry Applications
Choongho Yu; Jody Vykoukal; Daynene M. Vykoukal; Jon A. Schwartz; Li Shi; Peter R. C. Gascoyne
2005
2005, vol.14, no.3
A Hybrid PZT-Silicon Microvalve
Rajesh Duggirala; Amit Lai
2005
2005, vol.14, no.3
Multiple-Stage Microfabricated Preconcentrator-Focuser for Micro Gas Chromatography System
Wei-Cheng Tian; Helena K. L. Chan; Chia-Jung Lu; Stella W. Pang; Edward T. Zellers
2005
2005, vol.14, no.3
Design, Fabrication, and Characterization of a Submicroelectromechanical Resonator With Monolithically Integrated CMOS Readout Circuit
Jaume Verd; G. Abadal; J. Teva; Maria Villarroya Gaudo; Arantxa Uranga; Xavier Borrise; Francesca Campabadal; Jaume Esteve; Eduardo Figueras Costa; Francesc Perez-Murano; Zachary J. Davis; Esko Forsen; Anja Boisen; Nuria Barniol
2005
2005, vol.14, no.3
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