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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2005
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2005, vol.14, no.1
2005, vol.14, no.2
2005, vol.14, no.3
2005, vol.14, no.4
2005, vol.14, no.5
2005, vol.14, no.6
题名
作者
出版年
年卷期
Torque Multiplication and Stable Range Tradeoff in Parallel Plate Angular Electrostatic Actuators With Fixed DC Bias
Ajay Pareek; Mehmet R. Dokmeci; Shivalik Bakshi; Carlos H. Mastrangelo
2005
2005, vol.14, no.6
Fully Compliant Tensural Bistable Micromechanisms (FTBM)
Daniel L. Wilcox; Larry L. Howell
2005
2005, vol.14, no.6
Influence of Bending-Extension Coupling on the Modal Frequencies of Nonsymmetrically Laminated MEMS Microcantilevers
Ronald F. Gibson; Zhengyu Liu; Niranjan Srinivasan
2005
2005, vol.14, no.6
Third-Order Intermodulation in a Micromechanical Thermal Mixer
Robert B. Reichenbach; Maxim Zalalutdinov; Keith L. Aubin; Richard Rand; Brian H. Houston; Jeevak M. Parpia; Harold G. Craighead
2005
2005, vol.14, no.6
A Methodology and Model for the Pull-In Parameters of Magnetostatic Actuators
Yael Nemirovsky; I. Zelniker; Ofir Degani; Gilaad Sarusi
2005
2005, vol.14, no.6
Multistep Sequential Batch Assembly of Three-Dimensional Ferromagnetic Microstructures With Elastic Hinges
Eiji Iwase; Isao Shimoyama
2005
2005, vol.14, no.6
A Novel Capacitive Pressure Sensor Based on Sandwich Structures
Min-Xin Zhou; Qing-An Huang; Ming Qin; Wei Zhou
2005
2005, vol.14, no.6
Deep-Reactive Ion-Etched Compliant Starting Zone Electrostatic Zipping Actuators
Jian Li; Michael P. Brenner; Thomas Christen; Markku Sami Kotilainen; Jeffrey H. Lang; Alexander H. Slocum
2005
2005, vol.14, no.6
High-Q UHF Micromechanical Radial-Contour Mode Disk Resonators
John R. Clark; Wan-Thai Hsu; Mohamed A. Abdelmoneum; Clark T.-C. Nguyen
2005
2005, vol.14, no.6
Design and Process Considerations for Fabricating RF MEMS Switches on Printed Circuit Boards
Hung-Pin Chang; Jiangyuan Qian; Bedri Artug Cetiner; Franco De Flaviis; Mark Bachman; G. P. Li
2005
2005, vol.14, no.6
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