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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
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2002
2003
2004
2005
2006
2007
2008
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2010
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2013
2005, vol.14, no.1
2005, vol.14, no.2
2005, vol.14, no.3
2005, vol.14, no.4
2005, vol.14, no.5
2005, vol.14, no.6
题名
作者
出版年
年卷期
Static Friction in Polysilicon Surface Micromachines
Ari Lumbantobing; Kyriakos Komvopoulos
2005
2005, vol.14, no.4
Mechanical Properties of Epitaxial 3C Silicon Carbide Thin Films
Kamili M. Jackson; Jeremy Dunning; Christian A. Zorman; Mehran Mehregany; William N. Sharpe, Jr.
2005
2005, vol.14, no.4
A Micromachined Refreshable Braille Cell
Jun Su Lee; Stepan Lucyszyn
2005
2005, vol.14, no.4
Design and Fabrication of a Novel Bimorph Microoptomechanical Sensor
Si-Hyung Lim; Jongeun Choi; Roberto Horowitz; Arunava Majumdar
2005
2005, vol.14, no.4
A Micromachined Kelvin Probe With Integrated Actuator for Microfluidic and Solid-State Applications
Larry L. Chu; Kenichi Takahata; Ponnambalam Ravi Selvaganapathy; Yogesh B. Gianchandani; J. Leon Shohet
2005
2005, vol.14, no.4
Micromachined Acoustic Resonant Mass Sensor
Hao Zhang; Eun Sok Kim
2005
2005, vol.14, no.4
A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an Insulating Substrate
Said Emre Alper; Tayfun Akin
2005
2005, vol.14, no.4
Bidirectional Electrostatic Actuator Operated With Charge Control
Toshiyuki Sugimoto; Kenichiro Nonaka; Mark N. Horenstein
2005
2005, vol.14, no.4
Robot Leg Motion in a Planarized-SOI, Two-Layer Poly-Si Process
Seth Hollar; Anita Flynn; Sarah Bergbreiter; K. S. J. Pister
2005
2005, vol.14, no.4
On-Chip Vacuum Generated by a Micromachined Knudsen Pump
Shamus McNamara; Yogesh B. Gianchandani
2005
2005, vol.14, no.4
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