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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2005
2006
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2013
2006, vol.15, no.1
2006, vol.15, no.2
2006, vol.15, no.3
2006, vol.15, no.4
2006, vol.15, no.5
2006, vol.15, no.6
题名
作者
出版年
年卷期
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
Gianluca Piazza; Philip J. Stephanou; Albert P. (Al)Pisano
2006
2006, vol.15, no.6
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance
Mustafa U. Demirci; Clark T.-C. Nguyen
2006
2006, vol.15, no.6
Engineering MEMS Resonators With Low Thermoelastic Damping
Amy Duwel; Rob N. Candler; Thomas W. Kenny; Mathew Varghese
2006
2006, vol.15, no.6
Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
Rob N. Candler; Matthew A. Hopcroft; Bongsang Kim; Woo-Tae Park; Renata Melamud; Manu Agarwal; Gary Yama; Aaron Partridge; Markus Lutz; Thomas W. Kenny
2006
2006, vol.15, no.6
Microfabrication Technology of Biodegradable Polymers for Interconnecting Microstructures
WonHyoung Ryu; Rainer J. Fasching; Murty Vyakarnam; Ralph S. Greco; Fritz B. Prinz
2006
2006, vol.15, no.6
Vacuum-Packaged Suspended MicroChannel Resonant Mass Sensor for Biomolecular Detection
Thomas P. Burg; Amir R. Mirza; Nebojsa Milovic; Christine H. Tsau; George A. Popescu; John S. Foster; Scott R. Manalis
2006
2006, vol.15, no.6
Fabrication of Flexible Neural Probes With Built-in Microfluidic Channels by Thermal Bonding of Parylene
Dominik Ziegler; Takafumi Suzuki; Shoji Takeuchi
2006
2006, vol.15, no.6
Oriented and Vectorial Patterning of Cardiac Myocytes Using a Microfluidic Dielectrophoresis Chip - Towards Engineered Cardiac Tissue With Controlled Macroscopic Anisotropy
Mo Yang; Chee Chew Lim; Ronglih Liao; Xin Zhang
2006
2006, vol.15, no.6
Formation of Microdroplets in Liquids Utilizing Active Pneumatic Choppers on a Microfluidic Chip
Cheng-Tso Chen; Gwo-Bin Lee
2006
2006, vol.15, no.6
Pneumatically Driven Microcage for Microbe Manipulation in a Biological Liquid Environment
Jerry Ok; Yen-Wen Lu; Chang-Jin "CJ" Kim
2006
2006, vol.15, no.6
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