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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
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2002
2003
2004
2005
2006
2007
2008
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2013
2006, vol.15, no.1
2006, vol.15, no.2
2006, vol.15, no.3
2006, vol.15, no.4
2006, vol.15, no.5
2006, vol.15, no.6
题名
作者
出版年
年卷期
Polyurethane Rubber All-Polymer Artificial Hair Cell Sensor
Jonathan M. Engel; Jack Chen; Chang Liu; David Bullen
2006
2006, vol.15, no.4
Effect of Temperature on In-Use Stiction of Cantilever Beams Coated With Perfluorinated Alkysiloxane Monolayers
Joelle Frechette; Roya Maboudian; Carlo Carraro
2006
2006, vol.15, no.4
Piezoelectrically Actuated Tunable Capacitor
Chuang-Yuan Lee; Eun Sok Kim
2006
2006, vol.15, no.4
A MEMS Reconfigurable DGS Resonator for K-Band Applications
Ehab K. I. Hamad; Amr M. E. Safwat; Abbas S. Omar
2006
2006, vol.15, no.4
High-Resolution Electrostatic Analog Tunable Grating With a Single-Mask Fabrication Process
Wei-Chuan Shih; Sang-Gook Kim; George Barbastathis
2006
2006, vol.15, no.4
Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite Process
Neal A. Hall; Murat Okandan; F. Levent Degertekin
2006
2006, vol.15, no.4
Spatial-Mode Analysis of Micromachined Optical Cavities Using Electrothermal Mirror Actuation
Wei Liu; Joseph J. Talghader
2006
2006, vol.15, no.4
Two-Axis Electromagnetic Microscanner for High Resolution Displays
Arda D. Yalcinkaya; Hakan Urey; Dean Brown; Tom Montague; Randy Sprague
2006
2006, vol.15, no.4
Fully Lagrangian Modeling of MEMS With Thin Plates
Srinivas Telukunta; Subrata Mukherjee
2006
2006, vol.15, no.4
Dynamic Pull-in of Parallel-Plate and Torsional Electrostatic MEMS Actuators
Gregory N. Nielson; George Barbastathis
2006
2006, vol.15, no.4
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