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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2005
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2012
2013
2012, vol.21, no.1
2012, vol.21, no.2
2012, vol.21, no.3
2012, vol.21, no.5
2012, vol.21, no.6
题名
作者
出版年
年卷期
Mechanical Design and Characterization for MEMS Thin-Film Packaging
Fabio Santagata; Jeroen J. M. Zaal; Victor Gonzalez Huerta; Luigi Mele; J. Fredrik Creemer; Pasqualina M. Sarro
2012
2012, vol.21, no.1
RF MEMS Fractal Capacitors With High Self-Resonant Frequencies
Amro M. Elshurafa; Ahmed G. Radwan; Ahmed Emira; Khaled N. Salama
2012
2012, vol.21, no.1
Poly-SiGe-Based MEMS Thin-Film Encapsulation
Bin Guo; Bo Wang; Lianggong Wen; Philippe Helin; Gert Claes; Jeroen De Coster; Bert Du Bois; Agnes Verbist; Rita Van Hoof; Guy Vereecke; Luc Haspeslagh; Harrie A. C. Tilmans; Stefaan Decoutere; Haris Osman; Robert Puers; Ingrid De Wolf; Shuji Tanaka
2012
2012, vol.21, no.1
A Thermoelectric Power Sensor and Its Package Based on MEMS Technology
De-Bo Wang; Xiao-Ping Liao; Tong Liu
2012
2012, vol.21, no.1
Novel First-Level Interconnect Techniques for Flip Chip on MEMS Devices
Jemmy Sutanto; Sindhu Anand; Chetan Patel; Jit Muthuswamy
2012
2012, vol.21, no.1
A 2 Degree-of-Freedom SOI-MEMS Translation Stage With Closed-Loop Positioning
Bonjin Koo; Xuemeng Zhang; Jingyan Dong; Srinivasa M. Salapaka; Placid M. Ferreira
2012
2012, vol.21, no.1
Parametric Study of Zigzag Microstructure for Vibrational Energy Harvesting
M. Amin Karami; Daniel J. Inman
2012
2012, vol.21, no.1
An Analytical Capacitance Model of Temperature-Sensitive, Large-Displacement Multimorph Cantilevers: Numerical and Experimental Validation
Sean Scott; Jeong-Il Kim; Farshid Sadeghi; Dimitrios Peroulis
2012
2012, vol.21, no.1
Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 nm Linewidth in 250 μm-Gap Silicon Fabry-Perot Cavities
Maurine Malak; Frederic Marty; Nicolas Pavy; Yves-Alain Peter; Ai-Qun Liu; Tarik Bourouina
2012
2012, vol.21, no.1
Fabrication and Analysis of a MEMS NIR Fabry-Perot Interferometer
Timothy J. Russin; Maxwell Kerber; Alicia Russin; Andrew Wang; Richard Waters
2012
2012, vol.21, no.1
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