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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2005
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2012
2013
2012, vol.21, no.1
2012, vol.21, no.2
2012, vol.21, no.3
2012, vol.21, no.5
2012, vol.21, no.6
题名
作者
出版年
年卷期
GHz High-Q Lateral Overmoded Bulk Acoustic-Wave Resonators Using Epitaxial SiC Thin Film
Songbin Gong; Nai-Kuei Kuo; Gianluca Piazza
2012
2012, vol.21, no.2
Four d.o.f. Piezoelectric Microgripper Equipped With a Smart CMOS Camera
B. Tamadazte; M. Paindavoine; J. Agnus; V. Petrini; N. Le-Fort Piat
2012
2012, vol.21, no.2
A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
K. Prashanthi; M. Naresh; V. Seena; T. Thundat; V. Ramgopal Rao
2012
2012, vol.21, no.2
The Micronium - A Musical MEMS Instrument
Johan B. C. Engelen; Hylco de Boer; Jethro G. Beekman; Laurens C. Fortgens; Derk B. de Graaf; Sander Vocke; Leon Abelmann
2012
2012, vol.21, no.2
An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
Matthew D. Williams; Benjamin A. Griffin; Tiffany N. Reagan; James R. Underbrink; Mark Sheplak
2012
2012, vol.21, no.2
Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology
Jiachou Wang; Xiaoyuan Xia; Xinxin Li
2012
2012, vol.21, no.2
"Organic CantiFET": A Nanomechanical Polymer Cantilever Sensor With Integrated OFET
V. Seena; Akash Nigam; Prita Pant; Soumyo Mukherji; V. Ramgopal Rao
2012
2012, vol.21, no.2
Real-Time Monitoring of Whole Blood Coagulation Using a Microfabricated Contour-Mode Film Bulk Acoustic Resonator
Wencheng Xu; Jennie Appel; Junseok Chae
2012
2012, vol.21, no.2
Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing
Jae-Woong Jeong; Sunwoo Kim; Olav Solgaard
2012
2012, vol.21, no.2
Fabrication of Seamless Roller Mold for Continuous Roller Imprinting of Microlens Array Films
Yung-Chun Lee; Hong-Wei Chen; Fei-Bin Hsiao
2012
2012, vol.21, no.2
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