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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2005
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2012
2013
2012, vol.21, no.1
2012, vol.21, no.2
2012, vol.21, no.3
2012, vol.21, no.5
2012, vol.21, no.6
题名
作者
出版年
年卷期
Parallel Heterogeneous Integration of Chip-Scale Parts by Self-Assembly
Kwang Soon Park; Ji Hao Hoo; Rajashree Baskaran; Karl F. Bohringer
2012
2012, vol.21, no.6
Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using Electromigration
S. M. Mohanasundaram; Rudra Pratap; Arindam Ghosh
2012
2012, vol.21, no.6
A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing Technique
A. Mohammadi; M. R. Yuce; S. O. R. Moheimani
2012
2012, vol.21, no.6
Fabrication Process for Integrating Nanoparticles With Released Structures Using Photoresist Replacement of Sublimated p-Dichlorobenzene for Temporary Support
Yongha Hwang; Rob N. Candler
2012
2012, vol.21, no.6
A Lithographic Resist-Based Simple Technology for High Yield Microfabrication of Air Bridges
S. Jie
2012
2012, vol.21, no.6
Polyethersulfone Membrane Coated With Nanoporous Parylene for Ultrafiltration
Gunawan Setia Prihandana; Hikaru Ito; Yuya Nishinaka; Yoshihiko Kanno; Norihisa Miki
2012
2012, vol.21, no.6
A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography
Sean R. Samuelson; Lei Wu; Jingjing Sun; Se-woon Choe; Brian S. Sorg; Huikai Xie
2012
2012, vol.21, no.6
Resonant PZT MEMS Scanner for High-Resolution Displays
Utku Baran; Dean Brown; Sven Holmstrom; Davide Balma; Wyatt O. Davis; Paul Muralt; Hakan Urey
2012
2012, vol.21, no.6
A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations
Tzeno Galchev; Ethem Erkan Aktakka; Khalil Najafi
2012
2012, vol.21, no.6
Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks
David R. Myers; Robert G. Azevedo; Li Chen; Mehran Mehregany; Albert P. Pisano
2012
2012, vol.21, no.6
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